AUTOMATED CASSETTE LOADING LED UV CURING SYSTEM
LED Light Source UV Curing System for Cassette-to-Cassette Processing
Low cost of operation, low emission and can support up to 300mmm wafers (12 inches)
LED UV film curing system uses Ultraviolet LED (Light Emitting Diode) light source for UV exposure. Curing performance (state of cure, curing speed) is no different compared to conventional (metal halide light source and high pressure mercury lamp) systems, and provides a very sufficient performance. A high-output LED driver developed by Technovision, achieves a UV intensity of 250mW/cm2 (10mm work distance).