LED Light Source UV Curing System for Cassette-to-Cassette Processing
Low cost of operation, low emission and can support up to 300mmm wafers (12 inches)

LED UV film curing system uses Ultraviolet LED (Light Emitting Diode) light source for UV exposure. Curing performance (state of cure, curing speed) is no different compared to conventional (metal halide light source and high pressure mercury lamp) systems, and provides a very sufficient performance. A high-output LED driver developed by Technovision, achieves a UV intensity of 250mW/cm2 (10mm work distance).

System Features


  • Applicable for all UV films with 365nm wavelength
  • Can process up to 300mm (12″) wafers
  • Near room temperature process
  • Uniform UV (ultraviolet) radiation over the entire sample stage
  • Automated wafer handling and cassette loading mechanism
  • Allows complete curing of film surface by means of Nitrogen (N2) purge
  • Simple operation with a safety interlocks
  • No UV light source replacement required for more than 10 years
  • Peak wavelength: 365nm
  • UV-curable pressure sensitive adhesives (PSA)
  • Wire tacking
  • Surface mount bonding for speakers
  • Die attachments
  • Pin attachments
  • Sealing and gasketing products
  • Flex circuit reinforcement and relief
  • Ferrite magnet bonding
  • Flip chips
  • UV Curing of inks and coatings on:
    • Printed circuit boards
    • Wires
    • Computer chips
    • Cellphone, OLEDs and semiconductors
    • Cables
    • Ribbon cables
    • Pins
    • Smart cards
    • Displays
    • Video tape recorders
    • Motors
    • Disk drives
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