Compact UV-Ozone Cleaner



The ProCleaner™ line of instruments provides benefits at price points that give choices for the researcher. The ProCleaner™ device is is a UV and Ozone cleaner designed to remove molecular levels of contamination to achieve the cleanest possible probes and surfaces. How does it work? A high intensity mercury vapor lamp generates 254nm light which cleaves the bonds of organic molecules on the surface. Strong emission at 185nm converts atmospheric oxygen into reactive ozone, which attacks the small molecular fragments and creates volatile organics.

This compact UV-Ozone Cleaning system features a 5” x 5“ x 1” sample stage area and boosts UV and ozone production using a custom synthetic quartz lamp. Operation is as simple as placing your samples in the chamber, closing the drawer, and setting the timer. This system features a safety interlock switch to protect users from UV and ozone exposure during the cleaning process.

The UV Ozone ProCleaner Plus features a 25% larger UV lamp for greater ozone production and faster cleaning.

We provide the most competitive prices including free nationwide shipping. This system can usually ship within 2-3 days.

Warranty: 2 (two) years limited warranty with lifetime support (no warranty for Pyrex glass chamber)

System Features


  • Heavy-gauge, reinforced metal case & chassis
  • UV light area: 100 x 100 mm ( 4″x4″)
  • Peak UV Intensity: 4.6 mW/cm2
  • Borosilicate Glass Pedestal for positioning versatility:  4” x 4” x 3⁄4”
  • Distance from sample stage to UV lamp: 1 1/16”
  • Distance from pedestal to UV lamp: 5/16”
  • Ultraviolet Wave length: 254 nm and 185 nm
  • Safety interlock & indicator lights
  • 0 to 60 minute process timer
  • Compact footprint: 9.5” x 8” x 6” (LxWxH)
  • Lightweight design: 9 lbs.
  • Available in 110 VAC or 208-240 VAC
  • Very low cost of ownership and operation
  • Room temperature process
  • Dry, chemical-free process
  • No waste generated
  • Safer than piranha solution
  • Ultra clean surfaces
  • Fast, easy to use
  • Pre-treating Surface Patterning Tools
  • Cleaning Silicon and Silicon Nitride AFM/SPM Probes
  • Cleaning Surface Plasmon Resonance (SPR) chips
  • Cleaning Quartz Crystal Micro-balance (QCM) sensors
  • Wafer Cleaning (Si, Ge, GaAs and all oxide crystal substrate)
  • UV-photopatterning of SAM surfaces
  • Surface Oxidation and Preparation
  • Improving Surface Hydrophilicity
  • Surface Cleaning and sterilization
  • Preparation for Thin Film Deposition
  • Ultraviolet Curing of UV-adhesives
  • Surface Patterning
  • Cleaning Lenses and Optics
  • Bonding and Oxidizing PDMS
  • Surface Sterilization
  • Clean MEMS Devices
  • Cleaning of Glass Slides

Request Quote

©2019 UVFAB® Systems, Inc. All Rights Reserved.
UVFAB® is committed to respecting your privacy.
The information you provide us will NEVER be sold or otherwise distributed outside of UVFAB.
For additional information please view our Privacy Policy.