Metrology Wafer Sensors for Leveling, Vibration and Gap Measurements

When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on our wireless Wafer Sensor measurement devices for leveling, vibration and gap measurement. These wafers are vacuum compatible, wireless and provide data in real-time.

Semiconductor fabs and OEMs value the accuracy, precision and versatility of these metrology wafers to enable improvements in fab yields and reduce wafer processing equipment downtime.