Auto Vibration Wafer Sensor

Wireless, thin and lightweight, wafer-shaped.
Available in 200mm and 300mm.

When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on our wireless Vibration Wafer Sensor measurement devices. These wafers are vacuum compatible, wireless, very thin, lightweight, and provide data in real-time.

Semiconductor fabs and OEMs value the accuracy, precision and versatility of these metrology wafers to enable improvements in fab yields and reduce wafer processing equipment downtime.

Wafer Size and Material:	200mm and 300mm (±0.05), Carbon Fiber
Wafer Thickness and Weight:	3.5mm, 150 grams
Operating Pressure:	10e^-6 to 760 Torr
Operating Temperature:	20 to 70℃
Battery Life:	Over 3 hours
Vibration Range and Resolution:	±2G (Default), ±0.02G Capture rate of 1ms (1000 data/second) FFT Frequency Analysis within 200Hz
Software:	View: Real-time Vibration, Frequency check, Auto mark function, Review: Replay Log File, Auto report function. Windows 7, 8, 10, 11
Wireless Communication:	Bluetooth, Class1, 2.4GHz
What’s Included:	Vibration Wafer Sensor, Charging case, Link Module, USB cable, Charging cable, Software, Carrying case.

Auto Vibration Wafer Sensor

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