300mm Advanced Gap Measurement Device

Wireless Precision Gap Measurement for Optimal Equipment Performance

• Set the perfect gap every time.
• Measure gaps at three key points to achieve the ideal setup for your equipment with speed and confidence.

Get instant, accurate results.

• View chamber readings at process pressure in real-time.
• Whether your application requires a perfectly parallel gap or a slight tilt, you’ll get the uniformity you need.

Consistent Tool-to-Tool Performance (chamber matching)

• Eliminate human variability and achieve repeatable, objective adjustments.
• Ensure every technician can set identical gaps across tools in your fab.
• Maintain superior process uniformity from tool to tool.

Faster Calibration & Real-Time Feedback

• Reduce calibration time with live feedback during adjustments.
• Instantly see when equipment settings are within tolerance, right from inside an evacuated process chamber.
• Speed up setups, maintenance, and troubleshooting with automatic handling.

Save Time. Save Costs. Maximize Performance.

• Achieve reliable results, reduce downtime, and streamline your operations with precision gap measurement technology designed to keep your process running at its best.