UVFAB provides specialized onsite semiconductor equipment diagnostic services to fabs, equipment OEMs, R&D facilities, MEMS facilities, and university cleanrooms worldwide.
Instead of purchasing, calibrating, maintaining, and managing specialized diagnostic equipment internally, let UVFAB bring the instrumentation and expertise directly to your facility.
Measure. Detect. Diagnose. Prevent Downtime.
Know What Is Happening Inside Your Equipment
Semiconductor equipment problems can be difficult and expensive to diagnose.
Particle excursions, excessive vibration, improper leveling, robot-handling problems, and subtle mechanical changes can contribute to process problems, wafer defects, extended troubleshooting and equipment downtime; costing thousands of dollars per day.
UVFAB uses specialized wafer-level diagnostic instrumentation to measure equipment performance under operating conditions, helping your equipment engineers identify abnormal conditions without investing in an entire suite of diagnostic equipment.
Our services can be used for:
- Equipment troubleshooting
- Particle excursion investigations
- Preventive maintenance verification
- Post-maintenance qualification
- Equipment installation and commissioning
- Robot and wafer-handling optimization
- Equipment or chamber matching
- Baseline measurements and tool fingerprinting
- Condition monitoring and trending
- Equipment modification verification
Three Powerful Equipment Diagnostic Services
Particle Detection & Excursion Analysis
Find the source of particle problems faster.
Particle excursions can result in lost wafers, reduced yield, extended troubleshooting, and equipment downtime.
UVFAB performs wafer-path particle diagnostics to help determine where particle activity is occurring within your semiconductor equipment.
Measurements can be performed through areas such as:
Load Port → EFEM → Aligner → Load Lock → Transfer Module → Process Chamber
Our analysis can provide:
- Particle counts
- Particle size distribution
- Wafer-path comparisons
- Chamber-to-chamber comparisons
- Particle excursion identification
- Before-and-after maintenance comparisons
- Historical particle trends
Instead of repeatedly opening equipment and searching for possible contamination sources, engineers can quickly gain quantitative information to help focus their investigation.
Vibration & Shock Analysis
See what the wafer experiences inside your equipment.
Abnormal vibration, mechanical shock, aggressive robot movement, and unstable wafer handoffs can be difficult to identify using conventional equipment diagnostics.
UVFAB measures vibration and shock from the wafer’s perspective as it travels through the equipment.
Potential applications include:
- Atmospheric robots
- Vacuum robots
- EFEMs
- Load ports
- Aligners
- Load locks
- Wafer handoffs
- Moving stages
- Process chambers
- Mechanical assemblies
Measurements can help identify abnormal events, compare equipment performance, establish baselines, and verify changes following maintenance or adjustment.
Leveling & Tilt Analysis
Measure equipment alignment at the wafer level.
Proper leveling and alignment can be critical to wafer handling and equipment performance.
UVFAB provides wafer-level leveling and tilt measurements for:
- Robot arms
- End effectors
- Pedestals
- Chucks
- Stages
- Aligners
- Load ports
- Wafer-handling systems
- Process equipment
Measurements can be performed before and after adjustments to provide objective verification of equipment condition.
Introducing the UVFAB FabCare™ Program
Quarterly Equipment Health & Diagnostic Services
Don’t wait for equipment problems to become downtime.
FabCare™ provides scheduled quarterly diagnostic visits that allow your equipment engineering team to periodically evaluate critical, problematic, or high-value equipment.
Before each visit, your engineers select and prioritize the equipment they want evaluated.
During each scheduled onsite day, UVFAB performs diagnostic measurements on as many customer-selected tools as reasonably achievable within the available service time.
Quarterly diagnostics can include:
Particle Detection • Vibration & Shock • Leveling & Tilt
The result is an ongoing equipment diagnostic program rather than a one-time snapshot.
Build an Equipment Health History
One measurement tells you what is happening today.
Quarterly measurements can show you what is changing.
UVFAB can compare diagnostic results over time to help identify developing equipment abnormalities.
For example:
Q1 → Establish Baseline
Q2 → Compare Performance
Q3 → Identify Changes
Q4 → Detect Significant Drift
Historical measurements can help equipment engineers identify changes in particle activity, vibration behavior, or equipment leveling before they develop into larger problems.
This transforms diagnostic testing into an ongoing equipment condition-monitoring program.
What’s Included?
UVFAB scheduled diagnostic service includes:
Specialized Diagnostic Instrumentation
UVFAB provides and maintains the diagnostic equipment required for the scheduled measurements.
Onsite Diagnostic Specialist
An experienced UVFAB specialist performs measurements in coordination with your equipment engineering team.
Multiple Equipment Diagnostics
We evaluate as many prioritized tools as reasonably achievable during each scheduled service day.
Data Analysis
Measurement data is reviewed to identify abnormal conditions, excursions, and significant differences.
Graphs & Results
Diagnostic results can include visual graphs, comparisons, particle distributions, vibration events, leveling measurements, and trends.
Quarterly Diagnostic Report
Contract customers receive a consolidated summary of equipment evaluated, findings, observations, and recommended follow-up actions.
Historical Trending
Where repeat measurements are available, results can be compared with previous diagnostic visits to identify changes over time.
Why Use UVFAB Instead of Purchasing Diagnostic Equipment?
Owning specialized diagnostic instrumentation involves more than the initial purchase.
Your organization may also need to manage:
- Capital equipment cost
- Calibration
- Maintenance and repairs
- Software
- Training
- Battery and equipment condition
- Storage and availability
- Periodic replacement and obsolescence
With UVFAB, you purchase the diagnostic capability when you need it.
We maintain the instrumentation and expertise.
Your equipment engineers receive the measurements, analysis, and results.
Ideal for Semiconductor Facilities Worldwide
UVFAB diagnostic services are designed for:
Semiconductor Fabs
Monitor critical production equipment, investigate excursions, and verify equipment following maintenance.
Semiconductor Equipment OEMs
Support equipment installation, troubleshooting, field service, qualification, and customer-support activities.
R&D and Pilot-Line Facilities
Gain access to specialized diagnostic capabilities without maintaining multiple dedicated instruments.
MEMS & Advanced Packaging Facilities
Evaluate wafer-handling equipment and process systems across diverse toolsets.
University Cleanrooms
Access advanced equipment diagnostic capabilities without major capital investment.
Put Better Data Behind Your Equipment Decisions
Your equipment engineers already know their tools.
UVFAB gives them another layer of objective diagnostic information to help answer important questions:
Where are the particles coming from?
Is this robot producing excessive vibration or shock?
Is this pedestal, stage, or robot arm properly leveled?
Did maintenance actually improve the equipment?
Has equipment behavior changed since last quarter?
Is this abnormal condition getting worse?
Better measurements can lead to faster troubleshooting, more focused maintenance, and better equipment decisions.
UVFAB Global Semiconductor Equipment Diagnostic Services
Measure. Detect. Diagnose. Prevent Downtime.
Particle Detection
Vibration & Shock Analysis
Leveling & Tilt Analysis
Quarterly Equipment Health Programs
Ready to Evaluate Your Equipment?
Schedule a one-day diagnostic pilot or ask about establishing a quarterly FabCare™ program for your facility.
UVFAB Systems
UVFAB Systems
UVFAB Systems, Inc.