Compact UV Ozone Cleaner, HELIOS-600

The HELIOS-600 UV Ozone Cleaning system is designed to remove molecular levels of organic contamination to achieve the cleanest possible surfaces on various types of substrates. A high-intensity mercury vapor UV grid lamp generates 254nm ultraviolet radiation which breaks the bonds of organic molecules on the surface. Strong emission at 185nm converts atmospheric oxygen into reactive ozone, which attacks the small molecular fragments and creates volatile organics.

This compact tabletop UV-Ozone Cleaner features a drawer-loaded sample stage that can process up to 6” (W) x 6“ (D) x 1.4” (H) substrates or up to 6-inch wafers, and boosts UV and ozone production using a custom synthetic quartz UV Grid lamp. Operation is as simple as placing your samples in the process chamber, closing the drawer, and setting the desired process time on the digital timer. This system features a drawer safety interlock switch to protect users from UV and ozone exposure during the cleaning process.

The HELIOS-600 model features a high-intensity UV Grid lamp for greater ozone production, more uniform UV irradiation and faster cleaning/disinfection rates.

• Peak UV Wavelengths: 185nm and 254nm
• Maximum sample height: 1.4″ (35mm)
• UV exposure area: 6” x 6” (150mm x 150mm)
• Weight: 9 lbs.
• System dimensions: 7.75″ x 8.37″ x 7″ (WxDxH)