UV Ozone Cleaning Systems provide a simple, inexpensive and fast method of obtaining ultra-clean surfaces free of organic contaminants on most substrates, such as quartz, silicon, gold, nickel, aluminum, gallium arsenide, alumina, glass slides, etc. Ultra-clean surfaces can easily be achieved by utilizing a UV Ozone Cleaner in just a few minutes after the substrate has been cleaned.

The UV Ozone Cleaning process is a photo-sensitized oxidation process in which the contaminant molecules of photo resists, resins, human skin oils, cleaning solvent residues, silicone oils, and flux are excited and/or dissociated by the absorption of short wavelength UV radiation. Atomic oxygen is simultaneously generated when molecular oxygen is dissociated by 185nm and ozone by 254nm ultra-violet wavelengths. The 254nm UV radiation is absorbed by most hydrocarbons and also by ozone. The products of this excitation of contaminant molecules react with atomic oxygen to form simpler, volatile molecules which desorbs from the surface. Therefore, when both UV wavelengths are present atomic oxygen is continuously generated, and ozone is continually formed and destroyed. Using a UV Ozone Cleaning system near atomically clean surfaces can be achieved in minutes without any damage to your devices.

What is the advantage of UV-Ozone Cleaning over other surface treatment options?

While there are several options for surface cleaning and sample preparation methods, UV-ozone cleaning shows several advantages over other methods.

Low Charging Damage on Substrates

In case of plasma treatment, charging damage caused by ion bombardment can be a serious challenge. It leads to degradation of electrical characteristics of devices. UV-ozone treatment offers surface treatment using oxygen radicals without plasma discharge.

No Hazardous Effluent

Wet cleaning requires effluent disposal of chemicals. In contrast to the wet cleaning method, UV-ozone treatment is a completely dry process. Our UV-ozone cleaners are equipped with ozone killer, and exhaust ozone is decomposed inside the system. There is no need to worry about ozone hazard inside a cleanroom.