Customized Temperature Wafers

Wireless and wired wafer temperature sensors for the Semiconductor Industry. Our wireless wafer sensor is attached to the top of a standard silicon wafer for fabrication process monitoring. It is less than 5mm thick, so it fits in wafer processing chambers and other critical semiconductor fabrication equipment. This wafer temperature sensor has 9 ultra-small, high-accuracy RTD sensors that are adhered to the surface of the wafer, giving you better accuracy than a wireless thermocouple wafer sensor (TC wafer sensor). Ideal for any remote temperature monitoring application that requires a high level of precision and accuracy with 2 to 9 high precision temperature probes.

Our wired temperature wafer sensors can measure from 350C to 1200C. These Temperature Wafer sensors are being used in many industries including semiconductor applications such as Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), Post Exposure Bake (PEB), Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), ION Implantation, Solar Cell, and many other thermally driven processes.